ISSP2019: The 15th International Symposium on Sputtering and Plasma Processes

ISSP2019: Presentation titles of invited speakers

Invited speaker

Title of presentation

  André Anders

 Plasma-Target Interactions in Magnetron Sputtering

  Ladislav Bardos

 Novel atmospheric plasma systems and applications

  Diederik Depla

 Multicomponent thin films by (reactive) magnetron sputtering

  Jenq-Gong Duh

 Multi-functionality of multi-component Zr-Cu-Ni-Al-N thin films for diffusion barrier,  anti-bacteria and bio-compatibility

  Jung-Hoon, Joo

 Review of system deisgn issues in highly ionized magnetron sputtering

  Erik Lewin

 Multi-component and high-entropy nitride coatings – synthesis, characterisation, and open questions

  Alfred Ludwig

 Combinatorial magnetron sputtering for the discovery of new materials

  Jiro Matsuo

 Sputtering of biomaterials with large cluster ion beams

  Andreas Pflug

 Plasma and process modelling for PVD deposition onto moving 3D substrates

  Yuichi Setsuhara

 Low-Temperature Formation of High-Mobility InGaZnOx Thin Film Transistor by ICP-Enhanced Reactive Plasma Processes

  Beng Kang Tay

 On the Synthesis, Engnieering and Applications of 2D Materials